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Zolinga za titaniyamu sputtering Ndi zigawo zofunika kwambiri pakupanga filimu yopyapyala, yomwe imagwiritsidwa ntchito kwambiri m'mafakitale osiyanasiyana popaka utoto. Zolinga izi zimakhala ngati gwero lazinthu zopangira makanema opyapyala a titaniyamu pagawo laling'ono pogwiritsa ntchito njira yotchedwa sputtering. Pochita izi, tinthu tating'onoting'ono ta titaniyamu timawombera titaniyamu, zomwe zimapangitsa kuti maatomu atulutsidwe ndikuyikidwa pamwamba pa gawo lapansi. Positi iyi yabulogu ifufuza momwe titaniyamu imagwirira ntchito, ndikuwunika momwe amapangira, kugwiritsa ntchito kwawo, komanso kutulutsa kwawoko komwe.

Ubwino wogwiritsa ntchito titaniyamu sputtering chandamale ndi chiyani?

Zolinga za sputtering za Titanium zimapereka maubwino ambiri munjira zowonda zamakanema, zomwe zimawapangitsa kukhala odziwika m'mafakitale osiyanasiyana. Chimodzi mwazinthu zopindulitsa kwambiri ndi titaniyamu yokha. Titaniyamu imadziwika ndi kuchuluka kwamphamvu kwa kulemera kwake, kukana kwa dzimbiri, komanso kuyanjana kwachilengedwe. Izi zimapangitsa kuti titaniyamu filimu yopyapyala ikhale yabwino kuti igwiritsidwe ntchito muzamlengalenga, zida zamankhwala, ndi zokutira zoteteza.

Akagwiritsidwa ntchito poponyera, mipherezero ya titaniyamu imapereka kumamatira kwabwino kwa magawo osiyanasiyana. Kumamatira kolimba kumeneku kumatsimikizira kuti filimu ya titaniyamu yoyikidwayo imakhalabe yolimba kuzinthu zomwe zili pansi, kumapangitsa kuti zinthuzo zikhale zolimba komanso zautali. Kuonjezera apo, zolinga za titaniyamu sputtering zimalola kuwongolera molondola pa makulidwe ndi kufanana kwa filimu yomwe yaikidwa, zomwe zimathandiza opanga kuti apeze zotsatira zokhazikika komanso zapamwamba.

Ubwino wina wofunikira wa titaniyamu sputtering ndi kusinthasintha kwawo malinga ndi njira zoyikamo. Atha kugwiritsidwa ntchito m'njira zosiyanasiyana zothirira, kuphatikiza kupopera kwa maginito, kupopera kokhazikika, ndi kupopera kwa ion mtengo. Kusinthasintha kumeneku kumalola kukhathamiritsa kwa ndondomeko yoyikapo potengera zofunikira za kagwiritsidwe ntchito kake, monga kuchuluka kwa malo, kachulukidwe ka filimu, ndi kapangidwe kapamwamba.

Zolinga za Titanium sputtering zimathandizanso kupanga mafilimu okhala ndi mawonekedwe abwino kwambiri. Makanema a Titanium dioxide (TiO2), omwe amatha kupangidwa potulutsa titaniyamu zomwe akufuna, amawonetsa chiwonetsero chambiri komanso kuwonekera. Zinthu izi zimawapangitsa kukhala ofunikira mu zokutira zowoneka bwino zamagalasi, magalasi, ndi zida zina zowunikira.

Kuphatikiza apo, zolinga za titaniyamu sputtering zimathandiza kupanga mafilimu okhala ndi makina opangidwa bwino. Mafilimu a titaniyamu omwe amaikidwa nthawi zambiri amawonetsa kuuma kwambiri, kukana kuvala, komanso ma coefficients otsika kwambiri. Makhalidwewa amawapangitsa kukhala oyenera kugwiritsa ntchito zida zodulira, zida zamagalimoto, ndi zokutira za tribological.

Kugwiritsiridwa ntchito kwa titaniyamu sputtering targets kumapangitsanso kuti pakhale mafilimu a alloy ndi apawiri pophatikizana ndi zinthu zina kapenanso kutulutsa kokhazikika. Kusinthasintha kumeneku kumatsegula mwayi wosintha mawonekedwe a makanema omwe adayikidwa kuti akwaniritse zofunikira zomwe zimagwiritsidwa ntchito, monga kuwongolera bwino, mphamvu zamaginito, kapena kukana mankhwala.

Mwachidule, ubwino wogwiritsa ntchito titaniyamu sputtering chandamale monga filimu adhesion bwino, kuwongolera makulidwe molondola, kusinthasintha mu njira deposition, wapamwamba kuwala ndi makina katundu, ndi luso kupanga aloyi ndi mafilimu apawiri. Zopindulitsa izi zimapangitsa kuti titaniyamu sputtering ikhale chida chamtengo wapatali padziko lonse la mafilimu ochepa kwambiri, zomwe zimathandiza kupanga zokutira zogwira mtima kwambiri pa ntchito zosiyanasiyana za mafakitale ndi zamakono.

Kodi sputtering imagwira ntchito bwanji ndi zolinga za titaniyamu?

Njira ya sputtering yokhala ndi zolinga za titaniyamu ndi njira yotsogola yoyika filimu yopyapyala yomwe imadalira mfundo zakusamutsa mwachangu komanso physics ya plasma. Kuti mumvetsetse momwe njirayi imagwirira ntchito, ndikofunikira kuigawa m'magawo angapo ofunikira.

Ntchitoyi imayamba ndikuyika chandamale cha titaniyamu m'chipinda cha vacuum. Cholinga ichi chimagwira ntchito ngati cathode mu dongosolo la sputtering. Mosiyana ndi chandamale, gawo lapansi lomwe filimu ya titaniyamu idzayikidwe imayikidwa ngati anode. Chipindacho chimasamutsidwa kuti pakhale malo otsekemera kwambiri, omwe amakhala pakati pa 10 ^ -6 mpaka 10 ^ -8 Torr. Vacuum iyi ndiyofunikira kuti muchepetse kuipitsidwa ndikuwonetsetsa kuti njira yaulere ya maatomu otayidwa ndi yayitali kuti ifike ku gawo lapansi.

Mulingo wa vacuum wofunidwa ukakwaniritsidwa, mpweya wa inert, nthawi zambiri argon, umalowetsedwa m'chipindamo mokakamizidwa. Mpweya umenewu umagwira ntchito ngati sputtering medium. Kenako, voteji yapamwamba imagwiritsidwa ntchito pakati pa cathode (chandamale cha titaniyamu) ndi anode (chogwira gawo lapansi), ndikupanga gawo lamagetsi mkati mwa chipindacho.

Munda wamagetsi umapangitsa ma electron aulere m'chipindamo kuti afulumire kupita ku anode. Pamene ma elekitironi akuyenda, amawombana ndi ma atomu a argon, kuwapangitsa iwo kukhala ma ion ndi kupanga ma argon ions abwino. Izi zimayambitsa kuphulika, zomwe zimapangitsa kuti pakhale plasma - mpweya wosalowerera ndale wopangidwa ndi ma ion, ma electron, ndi tinthu tating'onoting'ono.

Ma argon ions okhala bwino mu plasma amathamangitsidwa kupita ku chandamale cha titaniyamu chomwe chili ndi vuto loyipa. Ma ion amphamvuwa akafika pamalo omwe chandamale, amasamutsa mphamvu yawo ya kinetic kupita ku maatomu a titaniyamu. Ngati anasamutsa mphamvu kuposa pamwamba kumanga mphamvu ya titaniyamu maatomu, iwo ejected kuchokera chandamale pamwamba. Njira yotulutsa iyi ndiye chiyambi cha sputtering.

Ma atomu a titaniyamu otayidwa, omwe tsopano ali mu mpweya wa mpweya, amadutsa m'chipinda cha vacuum ndipo potsirizira pake amasunthika pamwamba pa gawo lapansi, kupanga filimu yopyapyala. Mphamvu zomwe maatomuwa amafika pagawo laling'ono la filimuyo zimakhudza momwe filimuyo ilili, monga kachulukidwe, adhesion, ndi mawonekedwe a crystalline.

Pofuna kupititsa patsogolo luso la sputtering, machitidwe ambiri amagwiritsa ntchito magnetron sputtering. Pakukonza uku, maginito amphamvu amayikidwa kumbuyo kwa chandamale, kupanga mphamvu ya maginito yofanana ndi malo omwe akuwongolera. Mphamvu ya maginito imeneyi imatchera ma elekitironi pafupi ndi chandamale, kuonjezera kuthekera kwa kugunda kwa ionizing ndi ma atomu a argon. Chotsatira chake ndi plasma yowonda komanso kuchulukira kwamadzimadzi.

Njira ya sputtering yokhala ndi titaniyamu ingathe kusinthidwanso kuti ikwaniritse mafilimu enieni. Mwachitsanzo, sputtering yowonongeka ingagwiritsidwe ntchito kupanga mafilimu a titaniyamu. Mwakusiyana uku, mpweya wokhazikika (monga mpweya kapena nayitrogeni) umalowetsedwa m'chipinda pamodzi ndi argon. Ma atomu a titaniyamu otayidwa amachitira ndi mpweya umenewu asanafike kapena atafika pagawo laling’ono, n’kupanga zinthu monga titanium dioxide (TiO2) kapena titanium nitride (TiN).

Kuwongolera pazigawo zosiyanasiyana monga kulowetsa mphamvu, kuthamanga kwa gasi, mtunda wa chandamale kupita ku gawo lapansi, ndi kutentha kwa gawo lapansi kumathandizira kukonza bwino mawonekedwe afilimu yoyikidwa. Mwachitsanzo, kuonjezera mphamvu ya magetsi kumapangitsa kuti filimuyi ikhale yokwera kwambiri, pamene kusintha mphamvu ya gasi kungakhudze njira yaulere ya maatomu otayika, motero, mapangidwe a filimuyo.

Mwachidule, kuponyedwa kwa titaniyamu ndi zolinga za titaniyamu kumaphatikizapo kupanga plasma, kuphulika kwa chandamale ndi ma ion amphamvu, kutulutsa maatomu a titaniyamu, ndi kuyika kwawo pa gawo lapansi. Njirayi, yophatikizidwa ndi kuthekera kowongolera magawo osiyanasiyana ndikuyambitsa mpweya wokhazikika, imapangitsa kuti titaniyamu sputtering ikhale njira yosunthika komanso yamphamvu yopanga makanema owonda apamwamba kwambiri kuti agwiritse ntchito mosiyanasiyana.

Ndi zinthu ziti zomwe zimakhudza magwiridwe antchito a titaniyamu sputtering?

Kuchita kwa zolinga za titaniyamu sputtering kumakhudzidwa ndi kuyanjana kovuta kwa zinthu zosiyanasiyana, zomwe zimathandiza kuti ntchito yonse ya sputtering ikhale yabwino komanso ubwino wa mafilimu oonda omwe amatsatira. Kumvetsetsa zinthu izi ndikofunikira kuti muwongolere bwino ndikukwaniritsa zomwe mukufuna filimuyo.

Chimodzi mwazinthu zazikulu zomwe zimakhudza ntchito ya titaniyamu sputtering chandamale ndi chiyero cha chandamale. Zolinga za titaniyamu zoyera kwambiri, zomwe nthawi zambiri zimakhala 99.99% kapena kupitilira apo, ndizofunikira popanga mafilimu apamwamba kwambiri osadetsedwa pang'ono. Zodetsedwa zomwe zili mu chandamale zimatha kuyambitsa zolakwika mufilimu yomwe yayikidwa, zomwe zimakhudza katundu wake ndi magwiridwe ake. Choncho, kusankha zolinga za titaniyamu zoyera kwambiri ndizofunika kwambiri, makamaka kwa mapulogalamu omwe amafunikira kuwongolera bwino kwa mafilimu ndi katundu.

Ma microstructure a chandamale cha titaniyamu amathandizanso kwambiri pakuchita kwake. Zinthu monga kukula kwa chimanga, mawonekedwe, ndi kugawa kungakhudze zokolola za sputtering ndi kufanana kwa filimu yoyikidwa. Zolinga zokhala ndi mawonekedwe owoneka bwino, osakanikirana nthawi zambiri amapereka kusasinthasintha kwanthawi zonse komanso kufanana kwamakanema. Opanga ena amapereka ma titaniyamu okonzedwa mwapadera okhala ndi ma microstructures okhathamiritsa kuti apititse patsogolo magwiridwe antchito a sputtering.

Pamwamba pa chandamalecho ndi chinthu chinanso chofunika kwambiri. Malo osalala, oyera amathandizira kuti sputtering ifanane komanso imachepetsa mwayi wa arcing kapena ejection ya particles panthawiyi. Kuwongolera nthawi zonse pamalo omwe chandamale, nthawi zambiri pogwiritsa ntchito sputtering, kumathandizira kuti zinthu ziziyenda bwino. Kuonjezera apo, kutentha kwa pamwamba pa chandamale panthawi ya sputtering kungasokoneze ntchito yake. Kuziziritsa kokwanira kwa chandamale ndikofunikira kuti tipewe kutenthedwa, komwe kungayambitse kupsinjika kwa kutentha, kugwedezeka, kapena kusungunuka kwa chandamale.

Mapangidwe a geometry ndi kapangidwe ka titaniyamu amakhudzanso magwiridwe ake. Zinthu monga makulidwe a chandamale, mawonekedwe, ndi mawonekedwe akukokoloka zimatha kukhudza kuchuluka kwa sputtering komanso kufanana kwa kanema. Mwachitsanzo, zolinga zamapulani zimagwiritsidwa ntchito nthawi zambiri, koma zomangira zozungulira kapena zozungulira zozungulira zimatha kukhala ndi zabwino pakugwiritsa ntchito zina, monga kugwiritsa ntchito bwino zinthu kapena kufananizidwa bwino m'malo akuluakulu.

Mphamvu ya sputtering ndi momwe amagwirira ntchito zimakhudza kwambiri zomwe mukufuna kuchita. Kupopera kwa DC nthawi zambiri kumagwiritsidwa ntchito ngati titaniyamu, pomwe RF sputtering imatha kugwiritsidwa ntchito poyimitsa zinthu kapena poyika ma insulating compounds. Kuchulukitsitsa kwamphamvu komwe kumagwiritsidwa ntchito pa chandamale kumakhudza kuchuluka kwa sputtering ndipo kumatha kukhudza momwe filimu yoyikidwira. Kuchulukirachulukira kwa mphamvu nthawi zambiri kumabweretsa mitengo yokwera kwambiri koma kungayambitsenso kutenthetsa kwa chandamale ndi kusakhazikika komwe kungachitike.

Kuphatikizika kwa mpweya wa sputtering ndi kupanikizika ndizofunikira kwambiri zomwe zimakhudza momwe chandamale ikugwirira ntchito. Ngakhale kuti argon ndi mpweya wochuluka kwambiri wotulutsa mpweya, kuwonjezera kwa mpweya wina (mwachitsanzo, mpweya kapena nayitrogeni kuti sputtering yowonongeka) isinthe kwambiri mphamvu ya sputtering ndi mafilimu. Kuthamanga kwa gasi kumakhudza njira yaulere ya maatomu ophwanyidwa ndi mphamvu yomwe amafikira gawo lapansi, zomwe zimakhudza kachulukidwe ka filimu, kupsinjika maganizo, ndi microstructure.

Kukonzekera kwa maginito m'makina a magnetron sputtering kumakhudza kwambiri ntchito ya chandamale. Mphamvu ndi mawonekedwe a mphamvu ya maginito zimakhudza kutsekeka kwa plasma, kutulutsa madzimadzi, komanso mawonekedwe akukokoloka. Kukonzekera koyenera komanso kosagwirizana ndi maginito angagwiritsidwe ntchito kukhathamiritsa ndondomeko ya sputtering pazinthu zosiyanasiyana.

Kutalikirana ndi gawo lapansi ndi chinthu china chomwe chimakhudza magwiridwe antchito. Mtundawu umakhudza kuchuluka kwa matupidwe, kufanana kwa filimu, ndi mphamvu ya maatomu ofika pamtunda. Kuwongolera gawoli ndikofunikira kuti mukwaniritse zomwe mukufuna filimuyo ndikuyika bwino.

Pomaliza, mawonekedwe a gawo lapansi ndi kukonzekera kungakhudze momwe chandamale ikugwirira ntchito pokopa chidwi cha filimu ndi kukula. Zinthu monga kutentha kwa gawo lapansi, kuuma kwapamtunda, ndi ukhondo zimatha kukhudza kumamatira ndi mawonekedwe a filimu ya titaniyamu yomwe yayikidwa, yomwe ingafunike kusintha magawo a sputtering.

Pomaliza, magwiridwe antchito a titaniyamu sputtering amatengera zinthu zingapo, kuphatikiza kuyera kwa chandamale, microstructure, mawonekedwe apamwamba, geometry, magawo a sputtering, ndi kasinthidwe kachitidwe. Kuwongolera zinthu izi kumafuna kumvetsetsa bwino za momwe sputtering imagwirira ntchito komanso kuwongolera mosamala mikhalidwe yoyika. Poganizira ndi kukonza bwino zosinthikazi, ndizotheka kukwaniritsa njira zotsogola zapamwamba za titaniyamu zomwe zimatulutsa makanema owonda omwe ali ndi mawonekedwe ofunikira ndi machitidwe osiyanasiyana.

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