chidziwitso

Kuyera kwa a cholinga cha titaniyamu sputtering ndichinthu chofunikira kwambiri chomwe chimakhudza kwambiri momwe amagwirira ntchito m'mapulogalamu osiyanasiyana, makamaka pakuyika mafilimu ochepa. Zolinga za Titanium sputtering zimagwiritsidwa ntchito kwambiri mu semiconductor, solar cell, ndi mafakitale opaka zokutira chifukwa champhamvu zawo komanso kusinthasintha. Kuyera kwa zolingazi kumakhudza mwachindunji ubwino wa mafilimu omwe aikidwa, mphamvu ya sputtering, ndi ntchito yonse ya zinthu zomaliza. Mu positi iyi yabulogu, tiwona ubale womwe ulipo pakati pa kuyera kwa titaniyamu ndi momwe amagwirira ntchito, kuyankha mafunso ofunikira ndikuwunikira mbali yofunika iyi ya sayansi ndi uinjiniya.

Kodi mitundu yosiyanasiyana ya titaniyamu sputtering chandamale changwiro ndi chiyani?

Zolinga za sputtering za Titanium zimapezeka m'magawo osiyanasiyana achiyero, chilichonse choyenerera kugwiritsa ntchito ndi zofunikira. Kuyera kwa chandamale cha titaniyamu nthawi zambiri kumawonetsedwa ngati kuchuluka, ndipo kuchuluka kwakukulu kumawonetsa kuyera kwambiri. Magulu odziwika bwino a titanium sputtering chandamale akuphatikizapo:

• 2N (99%) - Makalasi oyambira pazofunsira wamba
• 3N (99.9%) - Magiredi apakatikati pakuwongolera bwino kwamakanema
• 4N (99.99%) - Mlingo wapamwamba kwambiri wamapulogalamu apamwamba
• 5N (99.999%) - Kuyera kwapamwamba kwambiri pamapulogalamu ovuta

Kusankhidwa kwa chiyero cha kalasi kumadalira zofunikira zenizeni za ntchito ndi zofunikira za filimu yosungidwa. Magiredi oyeretsedwa kwambiri nthawi zambiri amapangitsa kuti filimuyo ikhale yabwino komanso kuchita bwino koma imabwera pamtengo wokwera.

Chiyero cha zolinga za titaniyamu sputtering zimatsimikiziridwa ndi kukhalapo kwa zonyansa, zomwe zingaphatikizepo zinthu monga oxygen, nitrogen, carbon, ndi iron. Zonyansazi zitha kukhala ndi zotsatirapo zazikulu pakuchita kwa omwe akufuna komanso zotsatira zake zamafilimu. Mwachitsanzo:

• Zonyansa za okosijeni zingayambitse mapangidwe a titaniyamu oxide magawo, zomwe zimakhudza magetsi ndi kuwala kwa filimu yoyikidwa.
• Kuwonongeka kwa nayitrogeni kungapangitse kupanga titaniyamu nitride, kusintha makina ndi mankhwala a filimuyo.
• Zodetsa za kaboni zingayambitse kupanga titaniyamu carbide, zomwe zingakhudze kuuma ndi kuvala kukana kwa wosanjikiza woyikidwa.
• Chitsulo ndi zonyansa zina zachitsulo zimatha kuyambitsa maginito osafunikira komanso kukhudza kapangidwe ka filimu yonse.

Kuyera kwapamwamba kumachepetsa zonyansa izi, zomwe zimapangitsa kuti filimuyo ikhale yosasinthasintha komanso yodziwikiratu. Izi ndizofunikira makamaka pamapulogalamu omwe kuwongolera kuwongolera bwino kwamakanema ndi katundu ndikofunikira, monga kupanga zida zapamwamba zamagetsi kapena zokutira zowoneka bwino kwambiri.

Kodi kuyeretsedwa kwa chandamale kumakhudza bwanji ntchito ya sputtering?

Kuyera kwa a cholinga cha titaniyamu sputtering zimakhudza kwambiri mphamvu ya sputtering. Zolinga zaukhondo wapamwamba nthawi zambiri zimabweretsa kuwongolera bwino kwa njira komanso magwiridwe antchito abwino. Nazi njira zazikulu zomwe chiyero cha chandamale chimakhudzira kuchita bwino kwa sputtering:

1. Zokolola za sputtering: Zolinga zoyera kwambiri nthawi zambiri zimakhala ndi zokolola zambiri, kutanthauza kuti maatomu ambiri a titaniyamu amachotsedwa pamalo omwe akuwunikira pa iyoni iliyonse. Izi zimabweretsa kutsika kwachangu komanso kugwiritsa ntchito moyenera zinthu zomwe mukufuna.
2. Nthawi yonse yomwe mukuwafunira: Zolinga zenizeni nthawi zambiri zimakhala ndi nthawi yayitali yogwira ntchito chifukwa cha kukokoloka kofananako komanso kuchepa kwa kuipitsidwa pamalo omwe mukufuna. Izi zimabweretsa kuchepa kwa zomwe mukufuna kusintha komanso kuchepetsa nthawi yopangira.
3. Kukhazikika kwa plasma: Zolinga zoyera kwambiri zimapangitsa kuti plasma ikhale yokhazikika panthawi ya sputtering. Kukhazikika kumeneku kumapangitsa kuti pakhale mitengo yofananira komanso kusinthasintha kwamavidiyo pagawo lililonse.
4. Kusamutsa mphamvu kwamphamvu: Zolinga zoyera nthawi zambiri zimakhala ndi matenthedwe abwino komanso magetsi, zomwe zimalola kusamutsa bwino mphamvu kuchokera kugwero lamagetsi kupita kumayendedwe opopera. Izi zitha kupangitsa kuti magetsi azigwiritsidwa ntchito bwino komanso kuti mtengo wake ukhale wotsika.
5. Kuchepetsedwa kwa arcing: Zolinga zoyera kwambiri sizimakonda kuchita masewera olimbitsa thupi panthawi ya sputtering, zomwe zingasokoneze ndondomekoyi ndikupangitsa kuti filimuyi ikhale yolakwika. Zochitika zochepa za arcing zimathandizira kuti pakhale njira zokhazikika komanso zogwira mtima za sputtering.

Mphamvu ya chiyero cha chandamale pakuchita bwino kwa sputtering imawonekera makamaka pamapulogalamu omwe amafunikira makanema owonda kwambiri kapena zokutira zazikulu. Mwachitsanzo, popanga zida zapamwamba za semiconductor kapena mapanelo akulu adzuwa, ngakhale kusintha pang'ono pakuchita bwino kwa sputtering kumatha kutanthauzira kupindula kwakukulu pakupanga ndi kutsika mtengo.

Ndikofunikira kudziwa kuti ngakhale milingo yaukhondo wapamwamba nthawi zambiri imapereka magwiridwe antchito abwino, kusankha koyenera kwa chandamale kumadalira pakugwiritsa ntchito komanso mtengo wake. Nthawi zina, ubwino wa zolinga zoyeretsedwa kwambiri sizingagwirizane ndi mtengo wowonjezera, makamaka pazofunsira zochepa. Chifukwa chake, ndikofunikira kuti muwunikire zofunikira pa pulogalamu iliyonse ndikusankha chiyero choyenera kuti muchepetse magwiridwe antchito komanso kutsika mtengo.

Kodi zotsatira za titaniyamu chandamale chiyero pa filimu woonda katundu?

Chiyero cha zolinga za titaniyamu sputtering ali ndi chikoka kwambiri pa katundu wa filimu woonda waikamo. Zolinga zaukhondo wapamwamba nthawi zambiri zimabweretsa mafilimu okhala ndi mikhalidwe yabwino komanso mawonekedwe osasinthasintha. Nazi zina mwazotsatira zazikulu za titaniyamu chandamale chiyero pa filimu woonda katundu:

1. Kapangidwe kakanema: Zolinga zachiyero zapamwamba zimatulutsa makanema omwe ali ndi mawonekedwe olondola komanso oyendetsedwa bwino. Izi ndizofunikira kwambiri pakugwiritsa ntchito momwe filimuyi ilili yofunika kwambiri, monga kupanga titanium nitride (TiN) kapena zokutira za titanium dioxide (TiO2).
2. Kapangidwe ka Crystal: Kuyera kwa chandamale kumatha kukhudza kapangidwe ka kristalo ka filimu yoyikidwa. Zolinga zachiyero chapamwamba nthawi zambiri zimabweretsa mafilimu okhala ndi mawonekedwe a kristalo odziwika bwino komanso zolakwika zochepa, zomwe zimapangitsa kuti magetsi, kuwala, ndi makina aziwoneka bwino.
3. Katundu wamagetsi: Makanema oyikidwa kuchokera ku zolinga zachiyero chapamwamba nthawi zambiri amawonetsa mphamvu zamagetsi, kuphatikiza kutsika kwamphamvu komanso kutsika kwamphamvu. Izi ndizofunikira makamaka pamapulogalamu monga zokutira zowoneka bwino kapena zolumikizira zamagetsi pazida za semiconductor.
4. Zowoneka bwino: Mawonekedwe owoneka bwino a makanema owonda, monga index refractive ndi kuwonekera, amatha kutengera kuyera kwa chandamale. Zolinga zoyera kwambiri nthawi zambiri zimapanga makanema okhala ndi mawonekedwe osasinthika komanso odziwikiratu, omwe ndi ofunikira kwambiri pamagwiritsidwe ntchito ngati zokutira ndi zida za photovoltaic.
5. Katundu wamakina: Kulimba, kumamatira, ndi kukana kwa mafilimu opyapyala a titaniyamu kumatha kupitilizidwa pogwiritsa ntchito mipherezero yapamwamba kwambiri. Izi ndizopindulitsa makamaka pamapulogalamu omwe amafunikira zokutira zolimba komanso zokhalitsa, monga zida zodulira kapena malo osamva kuvala.
6. Surface morphology: Makanema osungidwa kuchokera ku zolinga zaukhondo wapamwamba nthawi zambiri amawonetsa malo osalala okhala ndi zolakwika zochepa komanso zonyansa. Izi zitha kupititsa patsogolo magwiridwe antchito pomwe mawonekedwe apamwamba ndi ofunikira, monga magalasi owoneka bwino kapena zida zamagetsi zolondola.
7. Kachulukidwe kakanema: Zolinga zaukhondo wapamwamba nthawi zambiri zimatulutsa makanema owoneka bwino okhala ndi ziboda zochepa komanso opanda ungwiro. Izi zitha kupangitsa kuti zotchinga ziwonjezeke komanso magwiridwe antchito apakanema pamapulogalamu monga zokutira zosachita kutu kapena zotchingira mpweya.
8. Kukhazikika kwamafuta: Makanema omwe amasungidwa kuchokera ku zolinga zachiyero chapamwamba nthawi zambiri amawonetsa kukhazikika kwamafuta komanso kukana kuwonongeka pakutentha kokwera. Izi ndizofunikira pamapulogalamu omwe filimu yopyapyala iyenera kukhalabe ndi zinthu zake pansi pazovuta zachilengedwe.

Mphamvu ya chiyero cha chandamale pamakanema opyapyala ndi ofunikira kwambiri pamapulogalamu apamwamba monga kupanga ma semiconductor, pomwe ngakhale kusiyana kwakung'ono kwamawonekedwe a kanema kumatha kukhudza kwambiri magwiridwe antchito a chipangizocho. Mwachitsanzo, popanga zigawo za high-k dielectric kwa ma transistors apamwamba, chiyero cha chandamale cha titaniyamu chomwe chimagwiritsidwa ntchito poyika mafilimu a TiO2 chingakhudze mwachindunji mphamvu zamagetsi ndi kudalirika kwa chipangizo chomaliza.

Ndikoyenera kudziwa kuti ngakhale kuti zolinga zapamwamba za chiyero nthawi zambiri zimapangitsa kuti mafilimu awoneke bwino, ubalewu sumakhala wofanana nthawi zonse. Nthawi zina, pangakhale kuchepa kwa kubweza kwabwino kwa filimu kupitilira mulingo wina wachiyero. Kuphatikiza apo, zinthu zina monga magawo oyika, magawo a gawo lapansi, ndi chithandizo chapambuyo pake zitha kukhudzanso kwambiri filimu yomaliza.

Pomaliza, kuyera kwa zolinga za titaniyamu sputtering kumagwira ntchito yofunika kwambiri pakuzindikiritsa momwe ma sputtering amagwirira ntchito komanso mtundu wa makanema owonda omwe amatsatira. Zolinga zachiyero chapamwamba nthawi zambiri zimapereka maubwino pakuchita bwino kwazinthu, kuwongolera kalembedwe kakanema, komanso mawonekedwe onse afilimu. Komabe, kusankha koyenera kwa kuyeretsedwa kwa chandamale kumatengera zofunikira za pulogalamu iliyonse, kulinganiza mapindu a magwiridwe antchito ndi malingaliro amtengo. Pamene teknoloji ikupitirirabe patsogolo, kufunikira kwa chiyero chapamwamba zolinga za titaniyamu sputtering ikuyenera kuchulukirachulukira, ndikuyendetsanso zatsopano pakupangira zomwe mukufuna komanso njira zochepetsera mafilimu.

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Zothandizira

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