chidziwitso

Hafnium, chitsulo chosinthira choyera cha silvery, chakhala chofunikira kwambiri pakuyika filimu yopyapyala, makamaka pakugwiritsa ntchito sputtering. Makhalidwe ake apadera amapanga zinthu zabwino kwambiri zolinga za hafnium sputtering, zomwe ndizofunikira m'mafakitale osiyanasiyana, kuphatikiza kupanga semiconductor, zokutira zowoneka bwino, ndi kafukufuku wazinthu zapamwamba. Cholemba chabuloguchi chiwunika zomwe zidapangitsa kuti hafnium atchuke pothamangitsa zolinga ndikuwunika momwe amagwiritsira ntchito ndi zabwino zake.

 

Kodi ndi zinthu ziti zapadera za hafnium zomwe zimapangitsa kuti ikhale yoyenera kusaka sputtering?

Hafnium ili ndi zinthu zingapo zosiyana zomwe zimapangitsa kuti ikhale yabwino kwambiri pazolinga za sputtering. Makhalidwewa amathandizira kuti azitha kugwira bwino ntchito munjira zowonda zamakanema ndikupangitsa kuti apange zokutira zapamwamba kwambiri. Tiyeni tiwone zina mwazinthu zazikulu zomwe zimasiyanitsa hafnium:

1. Malo osungunuka kwambiri: Hafnium ili ndi malo osungunuka pafupifupi 2,233 ° C (4,051 ° F), omwe ndi apamwamba kwambiri kuposa zida zina zambiri zomwe zimagwiritsidwa ntchito poponyera. Malo osungunuka kwambiriwa amalola hafnium kupirira kutentha kwakukulu komwe kumapangidwa panthawi ya sputtering popanda kuwononga kapena kupundutsa.
2. Kukhazikika kwabwino kwamafuta: Kuphatikiza pa malo ake osungunuka kwambiri, hafnium imawonetsa kukhazikika kwamafuta. Katunduyu amatsimikizira kuti chandamalecho chimasunga kukhulupirika kwake komanso kapangidwe kake ngakhale atakumana ndi kutentha kwanthawi yayitali panthawi ya sputtering.
3. Kutsika kwa nthunzi: Hafnium imakhala ndi mphamvu yotsika kwambiri ya nthunzi, yomwe imakhala yopindulitsa pakugwiritsa ntchito sputtering. Khalidweli limathandizira kuchepetsa kuipitsidwa kwa filimu yosungidwayo pochepetsa mwayi woti filimuyo isasunthike kapena kusasunthika kwa zinthu zomwe mukufuna.
4. Kuchulukana kwakukulu: Ndi kachulukidwe pafupifupi 13.31 g/cm³, hafnium ndi zinthu wandiweyani. Kuchulukana kumeneku kumathandizira kuti pakhale kutulutsa kwachangu komanso kumapangitsa kuti pakhale mafilimu owoneka bwino komanso owonda kwambiri.
5. Kukhazikika kwa mankhwala: Hafnium imadziwika ndi kukhazikika kwake kwamankhwala, makamaka kukana dzimbiri ndi okosijeni. Katunduyu amatsimikizira kuti chandamale cha sputtering chimakhala chokhazikika panthawi yosungidwa ndikugwiritsa ntchito, kusunga chiyero ndi magwiridwe antchito pakapita nthawi.
6. Kugwirizana ndi zinthu zina: Hafnium imatha kuphatikizidwa mosavuta kapena kuphatikizidwa ndi zinthu zina, kupangitsa kuti ikhale yosunthika popanga zopangira zophatikizika kapena zamitundu yambiri. Kugwirizana kumeneku kumathandizira kukonza nyimbo zomwe mukufuna kuti zikwaniritse zofunikira zafilimu yopyapyala.

Makhalidwe apaderawa pamodzi amathandizira kuti hafnium ikhale yokwanira ngati chandamale cha sputtering. Kutha kupirira kutentha kwakukulu, kukhalabe okhazikika, ndikupanga makanema owonda kwambiri kumapangitsa kukhala chisankho chowoneka bwino pamagwiritsidwe osiyanasiyana m'mafakitale a semiconductor ndi zamagetsi.

Kodi hafnium ikufananiza bwanji ndi zida zina zomwe zimagwiritsidwa ntchito popanga sputtering?

Poyerekeza hafnium ndi zida zina zomwe zimagwiritsidwa ntchito kwambiri poponyera zinthu, pali zinthu zingapo zomwe zimagwira ntchito. Kuti timvetsetse momwe hafnium alili muulamuliro wa zinthu zomwe akufuna kuwononga, ndikofunikira kulingalira momwe zimagwirira ntchito potengera njira zina monga titaniyamu, tantalum, ndi zirconium. Tiyeni tiwone momwe hafnium ikufananizira m'magawo osiyanasiyana:

1. Mfundo yosungunula: Malo osungunuka a Hafnium (2,233 ° C) amafanana ndi tantalum (3,017 ° C) komanso apamwamba kuposa titaniyamu (1,668 ° C) ndi zirconium (1,855 ° C). Malo osungunuka kwambiriwa amalola kuti zolinga za hafnium zisunge umphumphu panthawi yamagetsi apamwamba kwambiri.
2. Kuchuluka kwa Sputtering: Zokolola za sputtering za hafnium nthawi zambiri zimakhala zotsika kuposa za zinthu zopepuka ngati titaniyamu koma zapamwamba kuposa zolemera ngati tantalum. Kukolola kwapang'onopang'ono kumeneku kumapangitsa kuti filimuyi ikhale yoyendetsedwa bwino komanso kufanana kwa mafilimu.
3. Kusakanikirana: Kuchulukana kwa Hafnium (13.31 g/cm³) ndikwambiri kuposa titaniyamu (4.51 g/cm³) ndi zirconium (6.52 g/cm³) koma kutsika kuposa tantalum (16.69 g/cm³). Kachulukidwe kake kameneka kamathandizira kuti pakhale kusamutsidwa koyenera panthawi ya sputtering komanso kumathandizira kumamatira bwino kwamakanema.
4. Chemical reactivity: Poyerekeza ndi titaniyamu ndi zirconium, hafnium imakhala yochepa kwambiri, yomwe ingakhale yopindulitsa pazinthu zina zomwe zimafuna kuyanjana kochepa ndi mpweya wotsalira m'chipinda cha sputtering. Komabe, imakhala yotakasuka kwambiri kuposa zitsulo zolemekezeka monga platinamu kapena golide.
5. mtengo: Hafnium nthawi zambiri imakhala yokwera mtengo kuposa titaniyamu ndi zirconium koma yotsika mtengo kuposa zitsulo zina zamtengo wapatali zomwe zimagwiritsidwa ntchito poponya zinthu. Mtengo wake nthawi zambiri umayiyika ngati chinthu choyambirira pamapulogalamu apadera.
6. Kulimbana ndi magetsi: Hafnium ili ndi mphamvu yamagetsi yapamwamba kwambiri poyerekeza ndi zitsulo zopangira zinthu zambiri monga mkuwa kapena aluminiyamu. Katunduyu atha kukhala opindulitsa muzinthu zina zamagetsi zomwe zimafunikira kulimbikira kwambiri.
7. Kukana kwa okosijeni: Hafnium imapanga wosanjikiza wokhazikika wa oxide, womwe umapereka kukana kwa okosijeni kwabwino. Makhalidwewa ndi ofanana ndi zirconium koma apamwamba kuposa titaniyamu muzogwiritsa ntchito kutentha kwambiri.

Posankha chandamale cha sputtering, zofunikira zenizeni za ntchitoyo ziyenera kuganiziridwa. Kuphatikizika kwapadera kwa Hafnium kumapangitsa kuti ikhale yoyenera kugwiritsidwa ntchito m'makampani opanga ma semiconductor, komwe amafunikira mafilimu apamwamba kwambiri, apamwamba kwambiri a k ​​dielectric. Kutha kwake kupanga ma oxides okhazikika okhala ndi ma dielectric constants apamwamba kumapereka m'mphepete mwazinthu monga titaniyamu kapena aluminiyumu muzinthu zina zamagetsi zamagetsi.

Kuphatikiza apo, kuyanjana kwa hafnium ndi zida zina kumapangitsa kuti pakhale zolinga za alloy, monga hafnium-silicon kapena hafnium-tantalum, zomwe zitha kupangidwa kuti zikwaniritse zofunikira zamtundu wa filimu woonda. Kusinthasintha uku mu alloying kumakulitsanso ntchito zake zambiri poyerekeza ndi zolinga za chinthu chimodzi.

Mwachidule, ngakhale chinthu chilichonse chili ndi mphamvu zake, hafnium imakhala ndi malo apadera pamtundu wazinthu zomwe zimafuna sputtering. Kukhazikika kwake kwamatenthedwe, kutulutsa kwapang'onopang'ono, ndi katundu wamankhwala kumapangitsa kukhala chisankho chabwino kwambiri pamapulogalamu omwe amafunikira makanema apamwamba kwambiri, osasunthika, makamaka pakupanga zida zapamwamba za semiconductor ndi zida zamagetsi.

Kodi ntchito zazikulu za hafnium sputtering mumakampani a semiconductor ndi ziti?

Zolinga za Hafnium sputtering apeza ntchito zambiri mumsika wa semiconductor, makamaka chifukwa cha mawonekedwe awo apadera komanso makanema apamwamba kwambiri omwe amatha kupanga. Kugwiritsiridwa ntchito kwa hafnium m'munda uno kwakula kwambiri m'zaka zaposachedwa, makamaka pamene makampani akupita ku zipangizo zazing'ono komanso zogwira mtima kwambiri zamagetsi. Tiyeni tifufuze zina mwazomwe zimagwiritsidwa ntchito popanga ma hafnium sputtering popanga semiconductor:

1. High-k dielectric zigawo: Chimodzi mwazinthu zofunikira kwambiri za hafnium mumakampani opanga ma semiconductor ndikupanga magawo apamwamba a dielectric. Pamene ma transistors akupitilira kuchepa, ma dielectric achikhalidwe a silicon dioxide gate afika malire awo. Ma dielectrics opangidwa ndi Hafnium, monga hafnium oxide (HfO2), atuluka ngati njira yabwino kwambiri chifukwa cha kuchuluka kwawo kwa dielectric. Katunduyu amalola zigawo zokhuthala ndikusunga mawonekedwe amagetsi omwewo, kuchepetsa kutuluka kwaposachedwa ndikuwongolera magwiridwe antchito onse a chipangizocho.
2. Ma electrode a Metal gate: Kuphatikiza pa ma dielectrics apamwamba-k, hafnium imagwiritsidwanso ntchito muzitsulo zamagetsi zamagetsi. Ikaphatikizidwa ndi zitsulo zina, hafnium imatha kuthandizira kupanga ma elekitirodi azipata okhala ndi ntchito yoyenera ya ma transistors a NMOS ndi PMOS. Ntchitoyi ndiyofunikira pakupanga ukadaulo wapamwamba wa CMOS (Complementary Metal-Oxide-Semiconductor).
3. Zolepheretsa kufalikira: Hafnium ndi mankhwala ake amatha kukhala ngati zotchinga zolepheretsa kufalikira kwa zida za semiconductor. Zolepheretsa izi zimalepheretsa kusamuka kwa maatomu pakati pa zigawo zosiyana za chipangizocho, chomwe chili chofunikira kuti chikhale chokhazikika komanso chogwira ntchito chamagulu ophatikizika.
4. Zovala za Optical: Ngakhale sizomwe zimagwiritsidwa ntchito ngati semiconductor, mafilimu oonda opangidwa ndi hafnium amagwiritsidwa ntchito popanga zokutira zopangira zida zopangira semiconductor. Zovala izi zimatha kupititsa patsogolo magwiridwe antchito komanso kukhazikika kwa zinthu zowoneka bwino zomwe zimagwiritsidwa ntchito mumayendedwe a lithography ndi zida zina zopangira semiconductor.
5. Zipangizo za Resistive Memory: Hafnium oxide yawonetsa lonjezo pakupanga zida za resistive random-access memory (RRAM). Matekinoloje okumbukira am'badwo wotsatirawa atha kupereka kusungika kwakukulu kosungirako komanso kugwiritsa ntchito mphamvu zochepa poyerekeza ndi matekinoloje apano a kukumbukira.
6. Zipangizo za Ferroelectric: Kafukufuku waposachedwa wawonetsa kuti magawo ena a hafnium oxide amawonetsa ferroelectric properties. Kupeza kumeneku kwatsegula mwayi watsopano wa hafnium pakupanga ma transistors a ferroelectric field-effect transistors (FeFETs) ndi zida zina zatsopano.
7. Doping ndi alloying: Hafnium itha kugwiritsidwa ntchito ngati dopant kapena alloying element mu zida zosiyanasiyana za semiconductor kuti zisinthe mawonekedwe awo amagetsi, owoneka bwino, kapena mawonekedwe. Kusinthasintha kumeneku kumathandizira kukonza bwino kwazinthu kuti zikwaniritse zofunikira za chipangizocho.

The ntchito zolinga za hafnium sputtering M'mapulogalamuwa muli maubwino angapo:

• Kuchita bwino kwa chipangizochi: Ma dielectrics opangidwa ndi Hafnium-k high-k ndi zipata zachitsulo zimathandiza kuti ma transistors apitirirebe, zomwe zimapangitsa kuti pakhale zipangizo zofulumira komanso zogwiritsa ntchito mphamvu zambiri.
• Kudalirika kowonjezereka: Kukhazikika ndi kulimba kwa mafilimu opangidwa ndi hafnium kumathandizira kuti chipangizocho chikhale chodalirika komanso kuti nthawi yayitali ikugwira ntchito.
• Kugwirizana ndi njira zomwe zilipo: Hafnium nthawi zambiri imatha kuphatikizidwa m'njira zomwe zilipo kale zopangira semiconductor ndikusintha pang'ono, ndikuwongolera kukhazikitsidwa kwake m'malo opanga.
• Scalability: Pamene makampani opanga ma semiconductor akupitilira kukankhira kumagulu ang'onoang'ono a node, zida zopangidwa ndi hafnium zawonetsa kutha kwabwino, kuzipanga kukhala zoyenera ukadaulo wamtsogolo.

Pamene makampani a semiconductor akupitilirabe, udindo wa zolinga za hafnium sputtering ikuyenera kukulirakulira. Kafukufuku wopitilira muzinthu zatsopano zozikidwa pa hafnium ndi zida za chipangizocho akulonjeza kuti atsegula mapulogalamu ochulukirapo a chinthu chosunthikachi pakupanga zida zapamwamba zamagetsi ndi semiconductor.

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Zothandizira

1. Wang, X., ndi al. (2018). Hafnium-based high-k gate dielectrics. Mu Handbook of Thin Film Deposition (pp. 283-326). William Andrew Publishing.
2. Kaloyeros, AE, & Eisenbraun, E. (2000). Ultrathin diffusion zotchinga/liners kwa gigascale mkuwa metallization. Ndemanga Yapachaka ya Sayansi Yazinthu, 30 (1), 363-385.
3. Miikkulainen, V., et al. (2013). Crystallinity yamakanema osakhazikika omwe amakula ndi kusanjika kwa atomiki: mwachidule komanso zomwe zimachitika. Journal of Applied Physics, 113(2), 021301.
4. Robertson, J. (2006). High dielectric mosalekeza chipata oxides kwa zitsulo okusayidi Si transistors. Malipoti a Kupita patsogolo kwa Fizikisi, 69(2), 327.
5. Böscke, TS, et al. (2011). Ferroelectricity mu hafnium oxide woonda mafilimu. Makalata Ogwiritsidwa Ntchito a Fizikisi, 99(10), 102903.
6. Tan, YN, et al. (2007). Makanema a Hafnium-doped tantalum oxide high-k dielectric akugwiritsa ntchito CMOS. Journal of Applied Physics, 102(10), 104101.
7. Choi, JH, et al. (2018). Hafnium oxide-based resistive switching materials ndi zida za neuromorphic computing. Journal of Materials Chemistry C, 6 (23), 6146-6161.
8. Kittl, JA, et al. (2009). High-k dielectrics pazida zokumbukira zam'tsogolo. Microelectronic Engineering, 86 (7-9), 1789-1795.
9. Wong, HSP, & Salahuddin, S. (2015). Memory imatsogolera njira yabwino yamakompyuta. Nature Nanotechnology, 10 (3), 191-194.
10. Jiang, B., et al. (2018). Makanema owonda opangidwa ndi Hafnium mu high-k gate dielectric application: Ndemanga. Ndemanga za Fizikisi Yogwiritsidwa Ntchito, 5(2), 021303.